| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a carrier selection method and a carrier selection device which help to increase work efficiency. <P>SOLUTION: A carrier selection method uses a computer to select a carrier to store a wafer therein. In the carrier selection method, the computer executes: a prediction step of predicting the use time of the carrier to store the wafer therein on the basis of manufacturing conditions or manufacturing track records in forming semiconductor elements on the wafer; a remaining use time calculation step of finding a remaining use time of the carrier on the basis of a cleaning time limit of the carrier to store the wafer therein; and a carrier selection step of selecting, from among carriers whose remaining use time is longer than whose use time as a wafer transfer destination, a carrier whose remaining use time and whose use time have a difference equal to or less than a prescribed time. <P>COPYRIGHT: (C)2013,JPO&INPIT |
