| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an economical SF6 gas collection apparatus which can reduce a collection time of SF6 gas filling equipment in order to achieve a request that an operation stop time of the SF6 gas filling equipment including time to collect SF6 gas is preferably within a period of time equivalent to one hour. <P>SOLUTION: An SF6 gas collection apparatus 100 is configured to collect SF6 gas 10 into an SF6 gas collection tank 5 via a collection hose 6 from an SF6 gas filling equipment 1 with the SF6 gas filled therein, by using a combination of a vacuum pump 3 and a compressor 4. The SF6 gas collection apparatus 100 includes a pre-stage vacuum pump 2 disposed in the collection hose 6 that connects the post-stage vacuum pump 3 and the SF6 gas filling equipment 1 that is a pre-stage of the post-stage vacuum pump 3. An exhaust pressure of the pre-stage vacuum pump 2 is controlled so that a viscosity state of the SF6 gas 10 exhausted from the SF6 gas filling equipment 1 becomes a predetermined viscosity state allowing for operation of the post-stage vacuum pump 3. <P>COPYRIGHT: (C)2013,JPO&INPIT |
