| 摘要 |
<P>PROBLEM TO BE SOLVED: To hold a plurality of work-pieces independently by preventing twisting and damage in the piping and to increase adsorption power by eliminating the limitation on the rotation angle of a circular table. <P>SOLUTION: A circular table 1 is provided with a plurality of exhaust paths 10 including a plurality of suction ports 9 separately, and a piping block 8 is formed in an annular shape concentric with the circular table 1 and has a plurality of exhaust hoods 12 with which a piping joint 13 is connected. The piping block 8 is arranged on the lower surface side or outside of the circular table 1. Also the piping block 8 is supported by and fixed to a mobile 3 and the exhaust hood 12 is formed in an arc shape, and each exhaust hood 12 is caused to communicate with each exhaust path 10 on the side of the circular table 1 independently so that the adsorption power can be created in each suction port 9 independently. <P>COPYRIGHT: (C)2013,JPO&INPIT |
