| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vapor growth device comprising a substrate holder for holding a substrate, and a susceptor which holds the substrate holder rotatably and has a gear for receiving a rotation driving force transmitted externally on the outer periphery, in which the susceptor is not required to be replaced entirely even if the gear, or the like, is damaged and damage on the susceptor due to thermal stress caused by uneven temperature can be minimized. <P>SOLUTION: The vapor growth device is configured so that the gear of a susceptor can be separated freely from a susceptor body, and preferably configured of a susceptor body consisting of a disk-like member and a ring-like member provided on the outside thereof and the gear, or configured so that the gear consists of a plurality of arcuate members. <P>COPYRIGHT: (C)2013,JPO&INPIT |
