| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a structure of a mirror scanner and a manufacturing method thereof in which resonance frequency is adjusted accurately. <P>SOLUTION: A mirror scanner 10 includes a frame 12, a mirror part 14 for reflecting light from a light source, torsion bars 16a, 16b that connect between the frame 12 and the mirror part 14 and support the mirror part 14 with respect to the frame 12, and rod members 18a, 18b comprising a plurality of fusible bars that are provided in parallel in the torsion bars 16a, 16b and connecting between the frame 12 and the mirror part 14. <P>COPYRIGHT: (C)2013,JPO&INPIT |
