| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum device in which leak is prevented from being incurred by deforming an O-ring when introducing a linear moving force or rotational moving force into a vacuum chamber, by disposing a power source outside of the vacuum chamber. <P>SOLUTION: A tubular member 11 is provided in an opening 22 of a vacuum chamber 21, the head of a power transmission shaft 12 inserted to the tubular member 11 and the opening 22 is inserted into a vacuum chamber 21 and the root thereof is mounted to a power source 16 disposed outside of the vacuum chamber 21. Bearing gas is injected from an injection device 17 on an inner circumferential surface of the tubular member 11, and the power transmission shaft 12 is moved linearly and rotationally by operating the power source 16 while bringing the tubular member 11 and the power transmission shaft 12 into no contact. A plurality of exhaust channels are provided between the injection device 17 and the opening 22, and an exhaust channel close to the vacuum chamber 21 is connected to a vacuum exhaust device 15 with maximum exhaust conductance. Pressure in the exhaust channel closest to the opening 22 can be reduced and the inside of the vacuum chamber 21 can be made into high vacuum atmosphere. <P>COPYRIGHT: (C)2013,JPO&INPIT |
