| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a display device in which a passivation film on a terminal is removed without requiring dedicated device and without reducing manufacturing throughput. <P>SOLUTION: A display device includes: a plurality of pixels which are arranged in a matrix on a substrate and have a switching element and an MEMS shutter driven by the switching element; and a plurality of terminals which are arranged on the substrate and connected to external terminals. The MEMS shutter has: a shutter having an aperture; a first spring connected to the shutter; a first anchor connected to the first spring; a second spring; and a second anchor connected to the second spring. The MEMS shutter has an insulating film on surfaces of the shutter, the first spring, the second spring, the first anchor and the second anchor in a direction vertical to the substrate, and does not have an insulating film on surfaces of the plurality of terminals and surfaces of the shutter, the first spring, the second spring, the first anchor and the second anchor in a direction parallel to the surface of the substrate and on an opposite side of surfaces facing the substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
