METHOD AND APPARATUS FOR RECOVERING USED LIQUID COOLANT

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for recovering a liquid coolant which allow for circular reuse of a used liquid coolant discharged in a cutting step of a semiconductor ingot or a processing step of semiconductor wafers cut from the semiconductor ingot.

SOLUTION: A used liquid coolant recovering apparatus 1 includes: a centrifugal separator 4; a membrane separation device 5; and a reflow means. The centrifugal separator 4 roughly removes solid particles by processing a used liquid coolant discharged during cutting of a semiconductor ingot or discharged from a processing device 2 for semiconductor wafers cut from the semiconductor ingot. The membrane separation device 5 is made of fluororesin that can filtrate particles having a diameter of 0.02 μm or more in order to filtrate the used liquid coolant from which the solid particles are already removed by the centrifugal separator 4. The reflow means allows the used liquid coolant after passing through the membrane separation device 5 to return to the processing device 2.

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