| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an MEMS device in which a sensor whose electric potential can be acquired from a side of a support substrate and other sensors can be miniaturized and integrated. <P>SOLUTION: The MEMS device D includes an acceleration sensor (first sensor) S1 in which cross sectional portions of through electrodes 22a to 22e exposed to the side 2e of the support substrate 2a can be used as potential acquiring ports of movable electrodes 4 and 5 and fixed electrodes 20a to 21b; and a pressure sensor (second sensor) S2 having a sensor substrate 1A stacked on the acceleration sensor S1 via the support substrate 2a. <P>COPYRIGHT: (C)2013,JPO&INPIT |
