| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique of more easily acquiring reference data required for performing APC for each laser light source of an exposure device at shipment from a factory. <P>SOLUTION: The exposure apparatus includes a plurality of laser light sources (LD), acquires reference data to be used as a criterion for limiting a driving current to an acceptable range when performing APC for each LD, and stores the acquired data in a memory. The reference data of a first laser light source (LD1) is previously stored in the memory when shipped from a factory. With respect to other LDs, the reference data is acquired based on the reference data of LD1 stored in the memory. The exposure apparatus determines, as a driving current supplied to each LD other than LD1, each driving current by which an amount of light of each LD is equal to an amount of light of LD1 when the LD1 is caused to emit light based on the reference data of LD1 stored in the memory. Further, the determined driving current is stored in the memory as the reference data for each LD other than LD1. <P>COPYRIGHT: (C)2013,JPO&INPIT |
