发明名称 PROBE UNIT, CIRCUIT BOARD INSPECTION DEVICE AND PROBE UNIT MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a probe unit which realizes miniaturization while suppressing increase in manufacturing cost and occurrence of failure. <P>SOLUTION: A probe unit comprises: a plurality of probes 12; and a holding part 11 holding each probe 12. The holding part 11 is formed of a tabular body having insertion holes 11c. The probes 12 are formed of coated conductive wires 21 inserted into the insertion holes 11c in such a manner that tip parts 21c protrude from an underside 11a of the holding part 11, and are held by the holding part 11 through an elastic material 13 filled in the insertion holes 11c in a state of being movable along central axes A of the insertion holes 11c and also being insulated from the other coated conductive wires 21. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013002976(A) 申请公布日期 2013.01.07
申请号 JP20110134795 申请日期 2011.06.17
申请人 HIOKI EE CORP 发明人 HORI SEIICHI
分类号 G01R1/073;G01R31/26;H01L21/66 主分类号 G01R1/073
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