| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a group III nitride composite substrate and an evaluation method thereof, capable of evaluating whether or not a group III nitride thin film is arranged on a group III nitride support substrate, even if both the group III nitride support substrate and the group III nitride thin film have the substantially same chemical composition. <P>SOLUTION: This group III nitride composite substrate 1 satisfies at least one condition of a deviation angle between a condition wherein a deviation angle Δϕ between an optionally specified a-axis 21a of the group III nitride thin film 21 and an a-axis 10a of the group III nitride support substrate 10 which is the nearest to the a-axis 21a of the group III nitride thin film 21 is larger than 0° and smaller than 60°, and a condition wherein a deviation angle Δψ between a c-axis 21c of the group III nitride thin film 21 and a c-axis 10c of the group III nitride support substrate 10 is larger than 0° and smaller than 90°. <P>COPYRIGHT: (C)2013,JPO&INPIT |
