| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor device in which physique and cost increase are suppressed. <P>SOLUTION: A sensor device is configured by combining a first housing (10) and a second housing (20). The second housing (50) is formed tubular, its hollow is partitioned into a storage space and an introduction space by a metal diaphragm (60) and a link weld (61), and a channel (13) is formed in a terminal part of the first housing (10) at a side of the metal diaphragm (60). A pressure detection chamber (15) is comprised of the channel (13), the metal diaphragm (60) and the link weld (61), a pressure sensor (20) and a part of a terminal (30) are provided in the pressure detection chamber (15), and the pressure detection chamber is filled with a pressure transmission medium (16) which transmits to the pressure sensor (20) pressure of a pressure fluid acting on the metal diaphragm (60). Further, a temperature sensor (23) is provided in the pressure detection chamber (15). <P>COPYRIGHT: (C)2013,JPO&INPIT |
