发明名称 MAGNETIC FORCE MICROSCOPE AND MAGNETIC FIELD OBSERVATION METHOD USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a magnetic force microscope capable of highly stably measuring distribution of absolute values of a magnetic field without changing a magnetization state of a probe. <P>SOLUTION: The magnetic force microscope includes: a cantilever 6; a probe 5; a displacement detector 8 for detecting displacement of the cantilever; a sample table 2; and movement means (3, 4, 11, 16, 17) for moving the sample table. The magnetic force microscope is for measuring height distribution and magnetic field distribution on a surface of a sample 1 placed on the sample table. The magnetic force microscope further includes a magnetic field applying device 14 for applying the magnetic field to the probe 5, controls output of the magnetic field applying device 14 so that magnetic force applied to the probe 5 is zero, and measures the magnetic field distribution on the surface of the sample. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013002970(A) 申请公布日期 2013.01.07
申请号 JP20110134563 申请日期 2011.06.16
申请人 HITACHI LTD 发明人 HEIKE SEIJI
分类号 G01Q60/50 主分类号 G01Q60/50
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