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经营范围
发明名称
PROCEDE DE FABRICATION D'UN SUBSTRAT COMPRENANT UNE ETAPE D'AMINCISSEMENT AVEC ARRET A DETECTION D'UNE ZONE POREUSE
摘要
申请公布号
FR2957456(B1)
申请公布日期
2013.01.04
申请号
FR20100051714
申请日期
2010.03.10
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人
GAILLARD FREDERIC-XAVIER;NEMOUCHI FABRICE
分类号
H01L21/02;H01L21/461
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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