发明名称 |
MULTIPLE-COLUMN ELECTRON BEAM APPARATUS AND METHODS |
摘要 |
One embodiment disclosed relates an apparatus which includes an electromagnet arranged to provide a large-scale magnetic field in a region. The apparatus further includes an array of multiple electron beam columns formed in the region using an array of bores through magnetic material. Another embodiment relates to a method of generating an array of electron beams. A large-scale magnetic field is generated in a region using at least two magnetic poles. The array of electron beams is generated using an array of columns formed using bores through a magnetic material positioned in the region. Other embodiments, aspects and features are also disclosed.
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申请公布号 |
US2013001418(A1) |
申请公布日期 |
2013.01.03 |
申请号 |
US201213532487 |
申请日期 |
2012.06.25 |
申请人 |
SHADMAN KHASHAYAR;HAYES ROBERT G.;SEARS CHRISTOPHER MALCOLM STANLEY;NASSER-GHODSI MEHRAN |
发明人 |
SHADMAN KHASHAYAR;HAYES ROBERT G.;SEARS CHRISTOPHER MALCOLM STANLEY;NASSER-GHODSI MEHRAN |
分类号 |
G21K5/04;G21K5/08;H01J37/26 |
主分类号 |
G21K5/04 |
代理机构 |
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代理人 |
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