METHOD AND APPARATUS FOR MEASURING THE POWER OF A POWER GENERATOR WHILE OPERATING IN VARIABLE FREQUENCY MODE AND/OR WHILE OPERATING IN PULSING MODE

摘要

Methods and apparatuses are disclosed for measuring electrical characteristics of power that is applied to a plasma processing chamber when the electrical generator operates in a pulsing mode, when the electrical generator operates in a variable frequency mode, and when the electrical generator operates in both a pulsing mode and in a variable frequency mode concurrently.