发明名称 |
Methods for Pattering an Epitaxial Substrate and Forming a Light-Emitting Diode with Nano-Patterns |
摘要 |
A method for patterning an epitaxial substrate with nano-patterns, includes: forming a plurality of zinc oxide nano-particles on an epitaxial substrate; dry-etching the epitaxial substrate exposed from the zinc oxide nano-particles to form nano-patterns corresponding to the zinc oxide nano-particles; and removing the zinc oxide nano-particles on the epitaxial substrate. A method for forming a light-emitting diode having a patterned epitaxial substrate with the nano-patterns is also disclosed.
|
申请公布号 |
US2013005060(A1) |
申请公布日期 |
2013.01.03 |
申请号 |
US201213447977 |
申请日期 |
2012.04.16 |
申请人 |
ACEPLUX OPTOTECH, INC.;LO HSIN-MING;SHEI SHIH-CHANG |
发明人 |
LO HSIN-MING;SHEI SHIH-CHANG |
分类号 |
H01L33/22;H01L21/306 |
主分类号 |
H01L33/22 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|