发明名称 INTERACTION STRUCTURE FOR A STORAGE MEDIUM
摘要 A process manufactures an interaction structure for a storage medium. The process includes forming a first interaction head provided with a first conductive region having a sub-lithographic dimension. The step of forming a first interaction head includes: forming on a surface a first delimitation region having a side wall; depositing a conductive portion having a deposition thickness substantially matching the sub-lithographic dimension on the side wall; and then defining the conductive portion. The sub-lithographic dimension preferably is between 1 and 50 nm, more preferably 20 nm.
申请公布号 US2013001719(A1) 申请公布日期 2013.01.03
申请号 US201213612575 申请日期 2012.09.12
申请人 STMICROELECTRONICS S.R.L.;RIVA CATERINA;MURARI BRUNO;FRATTINI GIOVANNI 发明人 RIVA CATERINA;MURARI BRUNO;FRATTINI GIOVANNI
分类号 H01L29/82 主分类号 H01L29/82
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