发明名称 DETERMIMATION OF ABSOLUTE DIMENSIONS OF PARTICLES USED AS CALIBRATION STANDARDS FOR OPTICAL MEASUREMENT SYSTEMS
摘要 The present invention includes providing a plurality of standard particles; providing a substantially crystalline material having one or more characteristic spatial parameters, disposing the plurality of standard particles proximate to a portion of the substantially crystalline material, acquiring imagery data of the plurality of standard particles and the portion of the substantially crystalline material, establishing a spatial relationship between the plurality of standard particles and the portion of the substantially crystalline material utilizing the acquired imagery data, and determining one or more spatial parameters of the plurality of standard particles utilizing the one or more characteristic spatial parameters of the substantially crystalline material and the established spatial relationship between the plurality of standard particles and the portion of the substantially crystalline material.
申请公布号 WO2013003127(A1) 申请公布日期 2013.01.03
申请号 WO2012US43175 申请日期 2012.06.19
申请人 KLA-TENCOR CORPORATION;GUAN, YU 发明人 GUAN, YU
分类号 G01N15/02 主分类号 G01N15/02
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