发明名称 FILM-FORMING DEVICE
摘要 Provided is a film-forming device that can reduce the occurrence of inter-target contamination. The film-forming device is characterized by being provided with: a plurality of target electrodes provided with an attachment surface at which a target is attached; a substrate holder that holds a substrate at a position facing the plurality of target electrodes; a first shutter member that is provided rotatably between the plurality of target electrodes and the substrate holder, and that has a plurality of openings that can face the attachment surface; and a shield member that is disposed adjacent to the first shutter member and that has a number of openings equal to the number of target electrodes. The film-forming device is further characterized by the gap between the first shutter member and the shield member widening from the section of closest approach between adjacent target electrodes towards the outer periphery.
申请公布号 WO2013001714(A1) 申请公布日期 2013.01.03
申请号 WO2012JP03527 申请日期 2012.05.30
申请人 CANON ANELVA CORPORATION;KAJIHARA, YUJI;YASUMATSU, YASUSHI;KONAGA, KAZUYA 发明人 KAJIHARA, YUJI;YASUMATSU, YASUSHI;KONAGA, KAZUYA
分类号 C23C14/34 主分类号 C23C14/34
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