发明名称 |
MINI BLOCKER PLATE WITH STANDOFF SPACERS |
摘要 |
Embodiments of the present invention provide a plasma processing chamber having a mini blocker plate for delivering processing gas to a processing chamber and methods to use the mini blocker plate to improve uniformity. The blocker plate assembly comprising a mini blocker plate having a plurality of through holes, and two or more standoff spacers configured to position the mini blocker plate at a distance away from a blocker plate.
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申请公布号 |
US2013004681(A1) |
申请公布日期 |
2013.01.03 |
申请号 |
US201113174690 |
申请日期 |
2011.06.30 |
申请人 |
APPLIED MATERIALS, INC.;TSO ALAN;OH JEONGHOON;ZHENG YI;CHO TOM K.;YUAN ZHENG;ZHANG LIN;WANG QUNHUA;TINER ROBIN L. |
发明人 |
TSO ALAN;OH JEONGHOON;ZHENG YI;CHO TOM K.;YUAN ZHENG;ZHANG LIN;WANG QUNHUA;TINER ROBIN L. |
分类号 |
C23C16/50;F24H9/12 |
主分类号 |
C23C16/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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