发明名称 METHOD FOR MANUFACTURING AN ELECTROMAGNETIC RADIATION DETECTOR AND DETECTOR OBTAINED BY SUCH A METHOD
摘要 A method for removing the growth substrate of a circuit of electromagnetic radiation detection, especially in the infrared or visible range, said detection circuit including a layer of detection of said radiation made of Hg(1-x)CdxTe obtained by liquid or vapor phase epitaxy or by molecular beam epitaxy, said detection circuit being hybridized on a read circuit. The method includes submitting the growth substrate to a mechanical or chem.-mech. polishing step or to a chemical etch step to decrease its thickness, all the way to an interface area between the material of the detection circuit and the growth substrate; and submitting the interface thus obtained to an iodine treatment.
申请公布号 US2013005068(A1) 申请公布日期 2013.01.03
申请号 US201213529256 申请日期 2012.06.21
申请人 CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE;SOCIETE FRANCAISE DE DETECTEURS INFRAROUGES-SOFRADIR;PAUTET CHRISTOPHE;ETCHEBERRY ARNAUD;CAUSIER ALEXANDRE;GERARD ISABELLE 发明人 PAUTET CHRISTOPHE;ETCHEBERRY ARNAUD;CAUSIER ALEXANDRE;GERARD ISABELLE
分类号 H01L31/18 主分类号 H01L31/18
代理机构 代理人
主权项
地址