发明名称 |
METHOD FOR MANUFACTURING AN ELECTROMAGNETIC RADIATION DETECTOR AND DETECTOR OBTAINED BY SUCH A METHOD |
摘要 |
A method for removing the growth substrate of a circuit of electromagnetic radiation detection, especially in the infrared or visible range, said detection circuit including a layer of detection of said radiation made of Hg(1-x)CdxTe obtained by liquid or vapor phase epitaxy or by molecular beam epitaxy, said detection circuit being hybridized on a read circuit. The method includes submitting the growth substrate to a mechanical or chem.-mech. polishing step or to a chemical etch step to decrease its thickness, all the way to an interface area between the material of the detection circuit and the growth substrate; and submitting the interface thus obtained to an iodine treatment. |
申请公布号 |
US2013005068(A1) |
申请公布日期 |
2013.01.03 |
申请号 |
US201213529256 |
申请日期 |
2012.06.21 |
申请人 |
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE;SOCIETE FRANCAISE DE DETECTEURS INFRAROUGES-SOFRADIR;PAUTET CHRISTOPHE;ETCHEBERRY ARNAUD;CAUSIER ALEXANDRE;GERARD ISABELLE |
发明人 |
PAUTET CHRISTOPHE;ETCHEBERRY ARNAUD;CAUSIER ALEXANDRE;GERARD ISABELLE |
分类号 |
H01L31/18 |
主分类号 |
H01L31/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|