DIAPHRAGM BAROMETER

摘要

In order to basically solve the problem of the time-dependent change of a standard atmospheric pressure including a vacuum in a standard pressure chamber of a diaphragm barometer, provided is a diaphragm barometer in which even if the atmospheric pressure in a standard pressure chamber of the diaphragm barometer fluctuates due to, for example, the time-dependent change, a standard atmospheric pressure in the standard pressure chamber is measured and can be calibrated. In the diaphragm barometer having a standard pressure chamber, a heat-conduction-type barometric sensor is equipped in the standard pressure chamber, and the atmospheric pressure in the standard pressure chamber is measured constantly or as necessary to use the measured atmospheric pressure as a standard atmospheric pressure. The heat-conduction-type barometric sensor uses a silicon substrate and includes an absolute temperature sensor. The atmospheric pressure in the standard pressure chamber can also be adjusted to around a desired atmospheric pressure.