发明名称 PROCESS FOR HIGH-PRESSURE NITROGEN ANNEALING OF METAL NITRIDES
摘要 <p>The disclosure provides a process to anneal group III-V metal nitride crystals, wafers, epitaxial layers, and epitaxial films to reduce nitrogen vacancies. In particular, the disclosure provides a process to perform slow annealing of the group III-V metal nitrides in a high temperature and high pressure environment.</p>
申请公布号 WO2013003618(A1) 申请公布日期 2013.01.03
申请号 WO2012US44690 申请日期 2012.06.28
申请人 NITRIDE SOLUTIONS INC.;SCHMITT, JASON 发明人 SCHMITT, JASON
分类号 H01L29/20 主分类号 H01L29/20
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