| 摘要 |
A polymer film 102 is formed on a substrate 101, a thermistor resistor 106 is formed on the polymer film 102, and a light reflecting film 104 is formed between the thermistor resistor 106 and the substrate 101. For this reason, if infrared rays or terahertz waves are incident from above, a part is absorbed by the thermistor resistor 106, and most transmits the polymer film 102 and is reflected by the light reflecting film 104. When the distance between the thermistor resistor 106 and the light reflecting film 104 is d, a light component having a wavelength expressed by d=l/4 and equal to or smaller than l resonates and changes to heat, and the temperature of the thermistor resistor 106 rises. A change in resistance with a rise in the temperature of the thermistor resistor 106 is detected, thereby detecting the intensity of an infrared ray or a terahertz wave.
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