发明名称 STACKED VIA STRUCTURE FOR METAL FUSE APPLICATIONS
摘要 A back end of the line (BEOL) fuse structure having a stack of vias (122, 132). The stacking of vias (122, 132) leads to high aspect ratios making liner and seed coverage inside the vias poorer. The weakness of the liner (124) and seed layers leads to a higher probability of electromigration (EM) failure. The fuse structure addresses failures due to poor liner and seed coverage. Design features permit determining where failures occur, determining the extent of the damaged region after fuse programming and preventing further propagation of the damaged dielectric region.
申请公布号 WO2012134801(A3) 申请公布日期 2013.01.03
申请号 WO2012US28847 申请日期 2012.03.13
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION;FILIPPI, RONALD, G.;BONILLA, GRISELDA;CHANDA, KAUSHIK;GRUNOW, STEPHAN;LUSTIG, NAFTALI, E.;SIMON, ANDREW, H.;WANG, PING-CHUAN 发明人 FILIPPI, RONALD, G.;BONILLA, GRISELDA;CHANDA, KAUSHIK;GRUNOW, STEPHAN;LUSTIG, NAFTALI, E.;SIMON, ANDREW, H.;WANG, PING-CHUAN
分类号 H01L23/62;H01L21/82 主分类号 H01L23/62
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