METHOD FOR MANUFACTURING THIN-FILM PZT GLIDE HEAD FOR HARD DISK

摘要

The present invention relates to a method for manufacturing a thin-film PZT glide head for a hard disk, and more specifically, the invention enables: a glide head for detecting surface defects on hard disk drive media to be manufactured as a thin-film PZT such that a slider can be miniaturized compared with existing bulk-type sliders with various sizes being available from femto to pico size; an existing bulk-type piezoelectric element to be replaced with a thin-film piezoelectric element using a semiconductor step such that a low flying height and low sensitivity are obtained and the significance of weight or volume can be minimized; a thin-film PZT sensor formed on the upper part and an air bearing surface (ABS) formed on the lower part of said thin-film PZT sensor to be manufactured in an integrated manner such that a micro design can be accomplished compared to existing separation-type designs, thereby obtaining an advantageous technological position since the invention is favorable for fabricating femto-sized glide heads; the integration is performed in a semiconductor process whereby an economical value-added effect is produced; and the glide head is to be manufactured as a thin film such that miniaturization and weight reduction can be achieved, thereby additionally reducing the flying height compared to glide heads using existing bulk-type piezoelectric elements.