HEATING APPARATUS, VACUUM-HEATING METHOD AND METHOD FOR MANUFACTURING THIN FILM

摘要

This heating apparatus is provided with: a body to be heated in vacuum; a heating body, which is configured such that the heating body can be separated from the body to be heated, and that a space is formed between the heating body and the body to be heated; and a gas introduction path for introducing a heat-transfer gas into the space. The body to be heated is heated by means of the heating body via the heat-transfer gas. An example of the heating apparatus is a deposition apparatus (30). An example of the body to be heated is a storing container (9), which holds a deposition material, and has an opening for passing through the evaporated deposition material. An example of the heating body is a heating container (10), which removably stores the storing container (9), and has a heater (20) for heating the deposition material in the storing container (9). An example of the gas introduction path is a gas introducing tube (11).