发明名称 |
SILICON STRUCTURE, ARRAY SUBSTRATE USING THE SAME AND METHOD FOR PRODUCING SILICON STRUCTURE |
摘要 |
A silicon structure has a substrate, a first layer formed on a surface of the substrate, and a fibrous film formed on a surface of the first layer. The first layer and the fibrous film are silicon compounds made of the same elements, and the first layer and the fibrous film are directly bonded together.
|
申请公布号 |
US2013005614(A1) |
申请公布日期 |
2013.01.03 |
申请号 |
US201213608801 |
申请日期 |
2012.09.10 |
申请人 |
PANASONIC CORPORATION;YAMAMOTO TAKEKI;NAKATANI MASAYA;TAKAHASHI MAKOTO |
发明人 |
YAMAMOTO TAKEKI;NAKATANI MASAYA;TAKAHASHI MAKOTO |
分类号 |
C40B60/14;B05D1/36;B05D3/02;B05D3/06 |
主分类号 |
C40B60/14 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|