发明名称 SEMICONDUCTOR DEVICE AND METHOD
摘要 A semiconductor device and a method of manufacturing the device is disclosed. In one aspect, a method includes providing a substrate, providing a first epitaxial semiconducting layer on top of the substrate, and forming a one- or two-dimensional repetitive pattern, each part of the pattern having an aspect ratio in the range of about 0.1 to 50.
申请公布号 US2013001507(A1) 申请公布日期 2013.01.03
申请号 US201213438718 申请日期 2012.04.03
申请人 IMEC;CHENG KAI;CAYMAX MATTY 发明人 CHENG KAI;CAYMAX MATTY
分类号 H01L29/06;H01L21/20;H01L29/02 主分类号 H01L29/06
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