MATERIAL SUPPLY DEVICE, FILM FORMATION DEVICE

摘要

A material supply device for supplying a solid material after gasifying the same, the material supply device being provided with: a gasification member that has a supply surface to which the solid material is supplied and gasifies the solid material; a powder material supply member that supplies the solid material in powder form to the supply surface of the gasification member; a material dispersion member which is attached to the powder material supply member, is disposed so as to create a gap with the supply surface of the gasification member, and disperses the solid material in powder form on the supply surface of the gasification member; and a movement mechanism that moves the gasification member relative to the material dispersion member.