<p>Systems and methods are provided for cleaning an interior surface of a chemical vapor deposition reactor bell used in the production of polysilicon. In one method, the reactor bell is positioned atop a frame; a first actuator is operated such that the brush engages the interior surface of the reactor bell. A flow of liquid is directed from a nozzle against the interior surface of the reactor bell, and a second actuator is operated to rotate the brush.</p>
申请公布号
WO2013001068(A1)
申请公布日期
2013.01.03
申请号
WO2012EP62720
申请日期
2012.06.29
申请人
MEMC ELECTRONIC MATERIALS S.P.A.;BOVIO, EZIO;MOLINO, PAOLO;GAVA, DIEGO