发明名称 Pressure change-based sensor for determining measured variable in medium, has base plate with stationary electrode, and membrane frame that is mounted on base plate
摘要 The pressure change-based sensor has a base plate (01) with a stationary electrode (09). A membrane frame (04) is mounted on the base plate. A membrane (06) has a movable electrode facing the stationary electrode. The membrane frame is provided in the region of a guide section (16) of an electrical conductor (13). A recess (17) is provided into which a sealing unit is introduced in the membrane frame. The sealing unit is formed by a ceramic glass solder (18), silver-glass solder or applying coating by low-temperature-cofired-ceramic technology.
申请公布号 DE102011051441(A1) 申请公布日期 2013.01.03
申请号 DE20111051441 申请日期 2011.06.29
申请人 CIS FORSCHUNGSINSTITUT FUER MIKROSENSORIK UND PHOTOVOLTAIK GMBH 发明人 FRANK, THOMAS;HINTZ, MICHAEL
分类号 G01L9/12;G01L19/00 主分类号 G01L9/12
代理机构 代理人
主权项
地址