发明名称 |
Pressure change-based sensor for determining measured variable in medium, has base plate with stationary electrode, and membrane frame that is mounted on base plate |
摘要 |
The pressure change-based sensor has a base plate (01) with a stationary electrode (09). A membrane frame (04) is mounted on the base plate. A membrane (06) has a movable electrode facing the stationary electrode. The membrane frame is provided in the region of a guide section (16) of an electrical conductor (13). A recess (17) is provided into which a sealing unit is introduced in the membrane frame. The sealing unit is formed by a ceramic glass solder (18), silver-glass solder or applying coating by low-temperature-cofired-ceramic technology.
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申请公布号 |
DE102011051441(A1) |
申请公布日期 |
2013.01.03 |
申请号 |
DE20111051441 |
申请日期 |
2011.06.29 |
申请人 |
CIS FORSCHUNGSINSTITUT FUER MIKROSENSORIK UND PHOTOVOLTAIK GMBH |
发明人 |
FRANK, THOMAS;HINTZ, MICHAEL |
分类号 |
G01L9/12;G01L19/00 |
主分类号 |
G01L9/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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