发明名称 Semiconductor device having a field-effect transistor
摘要 An insulated gate field-effect transistor of a semiconductor device, said transistor having a channel region (CH) with a small width (channel length), is disclosed. Specifically, the width (L) of a portion of the channel region planarly overlapped with the gate electrode (G) is larger than or equal to 1/5 times the thickness (t) of the gate electrode and smaller than or equal to said thickness. Thus, variations in the threshold voltage can be reduced. Furthermore, a body region (BD) of the transistor has a lower portion projecting toward a drain region (DR) more than an upper portion of said body region.
申请公布号 EP2541607(A2) 申请公布日期 2013.01.02
申请号 EP20120174158 申请日期 2012.06.28
申请人 HITACHI LTD. 发明人 SHIRAKAWA, SHINJI;SAKANO, JUNICHI
分类号 H01L29/78;H01L21/265;H01L21/336;H01L29/08;H01L29/10 主分类号 H01L29/78
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