发明名称 |
COPPER OXIDE ETCHANT AND ETCHING METHOD USING THE SAME |
摘要 |
<p>In order to provide a copper oxide etchant and an etching method using the same capable of selectively etching exposure/non-exposure portions when laser light exposure is performed by using copper oxide as a thermal-reactive resist material, the copper oxide etchant for selectively etching copper oxides having different oxidation numbers in a copper oxide-containing layer containing the copper oxide as a main component contains at least a chelating agent or salts thereof.</p> |
申请公布号 |
EP2540801(A1) |
申请公布日期 |
2013.01.02 |
申请号 |
EP20110747093 |
申请日期 |
2011.01.14 |
申请人 |
ASAHI KASEI KABUSHIKI KAISHA |
发明人 |
NAKAGAWA, NORIKIYO;NAKATA, TAKUTO;MITAMURA, YOSHIMICHI |
分类号 |
H01L21/033;G03F7/00;H01L21/3213 |
主分类号 |
H01L21/033 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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