| 摘要 |
<p>A method comprises illuminating a sample (14) with a coherent source (11), generating a first interference image of the sample, inducing a phase shift in the coherent source, generating a second interference image of the sample, inducing a load on the sample, generating a third interference image of the sample, and generating a phase distribution based on the interference images. The first interference image represents surface stress in the sample (14), the second interference image includes carrier fringes based on the phase shift, the third interference image represents a change in the surface stress due to the load, and the phase distribution represents the change in the surface stress.</p> |
