| 发明名称 |
METHOD AND APPARATUS FOR PERFORMING PATTERN ALIGNMENT |
| 摘要 |
<p>A method of patterning a plurality of layers of a work piece in a series of write machines, wherein errors due to different transformation capabilities of different machines are compensated by distributing the errors over the plurality of layers.</p> |
| 申请公布号 |
EP2539777(A1) |
申请公布日期 |
2013.01.02 |
| 申请号 |
EP20110713197 |
申请日期 |
2011.02.25 |
| 申请人 |
MICRONIC MYDATA AB |
发明人 |
WAHLSTEN, MIKAEL;ZERNE, RAUL |
| 分类号 |
G03F7/20;G03F9/00;H05K3/00 |
主分类号 |
G03F7/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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