发明名称 Structure and method for manufacturing interconnect structures having self-aligned dielectric caps
摘要 Interconnect structures having self-aligned dielectric caps are provided. At least one metallization level is formed on a substrate. A dielectric cap is selectively deposited on the metallization level.
申请公布号 GB201220842(D0) 申请公布日期 2013.01.02
申请号 GB20120020842 申请日期 2012.11.20
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人
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