DEVICE FOR FORMING A REDUCED CHAMBER SPACE, AND METHOD FOR POSITIONING MULTILAYER BODIES

摘要

The device (30a) has a part for forming side wall elements of a process box (20a), where the device retains objects i.e. multilayered bodies (40, 50), such that the objects lie opposite to each other and surfaces (44, 54) of the objects are turned away from each other. A processing element is arranged between the objects, and transverse connecting elements have supporting elements i.e. pointed supporting elements e.g. ball elements, such that the bodies are supported in the connecting elements by the supporting elements. Independent claims are also included for the following: (1) a system for processing objects comprising a gas supplying element and/or a gas discharging element for supplying and/or discharging process gas into and/or from a chamber area and/or a process chamber (2) a method for positioning objects.