发明名称 MICROSCOPE AND MICROSCOPE MICROEXAMINATION PROCEDURE METHOD FOR THE MEASUREMENT OF THE SURFACE PROFILE OF AN OBJECT
摘要 <p>The microscope has a detection unit (14) detecting temporal successive sample radiation of sections, in which the unit is directed to the radiation by a scanner (5) in a detection optical path. An intensity of a confocally formed sample radiation is detected in a wavelength-dependent manner. The unit comprises a color module (9) with displaceable color longitudinal imperfection. The module is arranged between the scanner and a section, and is traversed by the sample radiation, so that a sectional width to be detected is adjusted by a modification of the color longitudinal imperfection. An independent claim is also included for a microscopic method for measuring a surface profile of an object.</p>
申请公布号 EP2010862(B1) 申请公布日期 2013.01.02
申请号 EP20070724288 申请日期 2007.04.17
申请人 CARL ZEISS MICROSCOPY GMBH 发明人 WINTEROT, JOHANNES
分类号 G01B11/24;G02B21/00 主分类号 G01B11/24
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