APPARATUS FOR MANUFACTURING SOLAR CELL SUBSTRATE AND METHOD FOR CONTROLLING THE SAME
摘要
PURPOSE: An apparatus for manufacturing a solar cell substrate and a method for controlling the same are provided to form an anti-reflection groove through a physical method and to smoothly perform a process for forming a large size. CONSTITUTION: A substrate stage(12) is mounted in a chamber. The substrate stage includes a solar cell board. A powder supply unit(20) includes a nozzle and a powder feed port. A powder aerosol is discharged from the nozzle to the substrate stage. The powder feed port supplies the powder aerosol to the nozzle. [Reference numerals] (50) Control unit; (60) Storage unit; (70) Calculation unit
申请公布号
KR20130000256(A)
申请公布日期
2013.01.02
申请号
KR20110060846
申请日期
2011.06.22
申请人
KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
发明人
LEE, MIN WOOK;PARK, JUNG JAE;KIM, DO YEON;YOON SUK GOO