发明名称 |
Method and apparatus for diagnosing status of parts in real time in plasma processing equipment |
摘要 |
Apparatus and methods for diagnosing status of a consumable part of a plasma reaction chamber, the consumable part including at least one conductive element embedded therein. The method includes the steps of: coupling the conductive element to a power supply so that a bias potential relative to the ground is applied to the conductive element; exposing the consumable part to plasma erosion until the conductive element draws a current from the plasma upon exposure of the conductive element to the plasma; measuring the current; and evaluating a degree of erosion of the consumable part due to the plasma based on the measured current.
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申请公布号 |
US8343305(B2) |
申请公布日期 |
2013.01.01 |
申请号 |
US20070896637 |
申请日期 |
2007.09.04 |
申请人 |
LAM RESEARCH CORPORATION;PATRICK ROGER |
发明人 |
PATRICK ROGER |
分类号 |
C23C16/00;C23F1/00;H01L21/306 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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