发明名称 |
Acoustic wave device with frequency control film |
摘要 |
An acoustic wave device includes a main resonator and a sub resonator each having a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on an upper side of the piezoelectric film. The sub resonator has a mass addition film on the upper electrode in a resonance area in which the upper electrode and the lower electrode face each other. At least one of the main resonator and the sub resonator is provided with a frequency control film on an upper side of the resonance area, and the frequency control film has a weight per unit area smaller than a weight of the mass addition film per unit area.
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申请公布号 |
US8344590(B2) |
申请公布日期 |
2013.01.01 |
申请号 |
US201213431642 |
申请日期 |
2012.03.27 |
申请人 |
TAIYO YUDEN CO., LTD.;YOKOYAMA TSUYOSHI;TANIGUCHI SHINJI;NISHIHARA TOKIHIRO;UEDA MASANORI |
发明人 |
YOKOYAMA TSUYOSHI;TANIGUCHI SHINJI;NISHIHARA TOKIHIRO;UEDA MASANORI |
分类号 |
H01L41/04;H03H9/205 |
主分类号 |
H01L41/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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