发明名称 Semiconductor device and fabrication method thereof
摘要 A semiconductor device includes: a metal-containing compound layer on a semiconductor substrate; a dielectric film on the semiconductor substrate and the metal-containing compound layer; a contact hole penetrating through the dielectric film to reach the metal-containing compound layer; a contact plug in the contact hole. The semiconductor device further includes a manganese oxide layer extending between the contact plug and respective one of the dielectric film and the metal-containing compound layer.
申请公布号 US8344508(B2) 申请公布日期 2013.01.01
申请号 US20090507386 申请日期 2009.07.22
申请人 PANASONIC CORPORATION;HINOMURA TORU 发明人 HINOMURA TORU
分类号 H01L23/535 主分类号 H01L23/535
代理机构 代理人
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