发明名称 Thin film transistor and manufacturing method thereof
摘要 Disclosed are a thin film transistor and a method of manufacturing the thin film transistor. An electrode layer of the thin film transistor includes a seed layer formed of a transparent conductive material doped with indium gallium zinc oxide (IGZO) and a main layer formed of a transparent conductive material. The thin film transistor includes a substrate, a gate electrode on the substrate, a gate insulation film on the substrate to cover the gate electrode, a semiconductor layer disposed on the gate insulation film in a region corresponding to the gate electrode, an electrode layer having a double layer structure and disposed on the gate insulation film in a manner such that a topside portion of the semiconductor layer is exposed through the electrode layer, and a passivation layer on the gate insulation film to cover the semiconductor layer and the electrode layer.
申请公布号 US8344384(B2) 申请公布日期 2013.01.01
申请号 US201113024978 申请日期 2011.02.10
申请人 SNU R&DB FOUNDATION;CHOI SUNG HWAN;HAN MIN KOO 发明人 CHOI SUNG HWAN;HAN MIN KOO
分类号 H01L29/04 主分类号 H01L29/04
代理机构 代理人
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