| 摘要 |
A method of forming isolation layer in a semiconductor device, comprising forming a trench on an isolation region of a semiconductor substrate by etching utilizing an isolation mask; forming a first insulating layer on a lower portion of the trench; forming a second insulating layer on the semiconductor substrate including the first insulating layer; etching the second insulating layer to increase an aspect ratio on the isolation region; and forming a third insulating layer on a peripheral region of the second insulating layer to fill moats formed on the second insulating layer with the third insulating layer.
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