| 发明名称 |
Application of digital light processor in imaging ellipsometer and the like systems |
| 摘要 |
Application of digital light processor (DLP) systems in an imaging ellipsometer or imaging polarimeter with a focusing means, sample and detector arranged to meet the Scheimpflug condition.
|
| 申请公布号 |
US8345241(B1) |
申请公布日期 |
2013.01.01 |
| 申请号 |
US20100806380 |
申请日期 |
2010.08.11 |
| 申请人 |
J. A. WOOLLAM CO., INC.;LIPHARDT MARTIN M. |
发明人 |
LIPHARDT MARTIN M. |
| 分类号 |
G01J4/00 |
主分类号 |
G01J4/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
