发明名称 Organic light emitting diode display and manufacturing method thereof
摘要 The described technology relates generally to an OLED display and manufacturing method thereof. The OLED display includes a substrate, a thin film transistor on the substrate and including a semiconductor layer, a gate electrode, a source electrode, and a drain electrode, and an organic light emitting element coupled to the thin film transistor and including a pixel electrode, an organic emission layer, and a common electrode, wherein the semiconductor layer is formed of a polycrystalline silicon layer, and remnants and contaminants at a surface of the polycrystalline silicon layer are reduced or eliminated through an atmospheric pressure plasma treatment. The semiconductor layer is formed of a polycrystalline silicon layer where remnants and contaminants at the surface thereof are reduced or eliminated through an atmospheric pressure plasma treatment.
申请公布号 US8343786(B2) 申请公布日期 2013.01.01
申请号 US201113068406 申请日期 2011.05.09
申请人 SAMSUNG DISPLAY CO., LTD.;PYO SUNG-CHUL 发明人 PYO SUNG-CHUL
分类号 H01L21/00 主分类号 H01L21/00
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