| 摘要 |
A piezoelectric element includes: a substrate; a lower electrode that is formed on and/or over the substrate; a piezoelectric substance layer that covers the lower electrode; and an upper electrode that is formed on and/or over the piezoelectric substance layer, wherein a side surface of the piezoelectric substance layer includes a first portion that extends from an upper surface of the piezoelectric substance layer and a second portion that extends from the first portion, the first portion is inclined at a first angle with respect to an upper surface of the substrate, the second portion is inclined at a second angle with respect to the upper surface of the substrate, the second angle is smaller than the first angle, and the upper electrode covers at least the first portion and the second portion.
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